特性：

真空烧结炉为内热式电阻加热真空炉，由炉体、加热室、真空机组、冷却水系统、充放气系统及电控系统等组成。

一、真空烧结炉炉体：

a) 双层水冷结构、材质为304不锈钢，内部按高真空要求抛光，外部抛光后喷砂处理；

b) 立式结构，炉体为圆柱形，下部为封头，上部为真空法兰。炉门位于炉体上方，与炉体为法兰连接，密封结构为法兰形式，耐高温氟橡胶唇型圈密封，手轮螺栓锁紧；

c) 真空口位于炉体上部，与真空机组真空法兰连接，耐高温氟橡胶O型圈密封；

d) 电极引入装置位于炉体的下部，共计三组。材质为紫铜。炉内与炉外采用刚玉管绝缘，封接结构。与炉体采用法兰连接，O型密封圈；

e) 炉体上装有充放气装置，充气口位于炉体的下方，放气口位于炉体的上方；

f) 炉体上设有一个控温口，钨铼热电偶测温；并设有电极引入装置用于1100℃保温状态下均温性测量。

二、真空烧结炉加热室：

a) 用于真空或保护气氛。

b) 发热体是高强石墨加热器（采用日本东海碳素石墨，该石墨电阻率稳定、灰份低、导热性均匀），它在均温区外环形对称分布，采用三区分布的加热方式保证了最佳的温度均匀性和工件的均匀受热。

c) 保温材料为美国进口硬质碳毡（保温材料是真空炉的重要组成部分，我公司设备的保温材料均采用美国进口硬质碳毡，其产品具有优良的隔热性能， 低灰分、碳化温度高、低容重、热膨胀系数小等特点，是高温真空炉必备的高性能绝热材料）及莫来石保温毡反射屏；

d) 发热体更换方便。整个加热区可以作为一个结构完备的部件被拆卸出来，便于维护和修理。装料台安装在炉子底座上，由耐高温的材料支承组成。

三、真空烧结炉真空系统：

a) 采用KT-250扩散泵/ZJP-150罗茨泵/2X-30旋片泵三级高真空机组，机组前加过滤器，延长真空泵的使用寿命；

b) 真空阀、电磁放气阀、管路、波纹管等组成机组；管路上留有检漏口、真空计接口；

四、冷却水系统：

根据真空炉各部分对冷却水的要求，制作集水排、由阀门、管路等组成；对炉体、炉门、密封圈、真空泵及水冷电极等进行冷却。其中总进水管路安装水压传感器确保设备安全。

五、充放气系统：

由电磁阀、微调阀及管路构成，可设定不同的充气压力范围，通过压力开关可自动充气和补气。

六、电控系统：

a) 采用欧姆龙可编程控制器PLC、便携式笔记本电脑、自主开发的组态软件,根据工艺要求对设备进行自动控制、数据采集、数字显示以及存贮记录。可记录和显示温度、真空度、压力等参量的变化。存贮数据可查询、复制，连接打印机（用户自备）可打印输出历史曲线记录。

b) 日本岛电公司FP93数显控温表，用来对升温过程进行智能控制及显示，使升温过程按照工艺要求分步分段进行；测温选用钨铼热电偶；

c) 加热电源：三相、晶闸管可控硅电源；

d) 复合数显真空计，低真空下为热偶计，高真空下为电离计；

e) 所有仪表及控制元件集中在一个特制电控柜内；

f) 设置必要的报警及保护，例如超温、水压低、气压低等。

七、 工作平台:

由型钢及连接件制造一个操作平台，上部铺设不锈钢板。下部放置真空机组及变压器，水冷接口，电极引入铜排等，上部放置真空炉体及控制面板。

Internal heat type resistance heating vacuum sintering furnace

Features :

The vacuum sintering furnace is an internal heat type resistance heating vacuum furnace, which is composed of a furnace body, a heating chamber, a vacuum unit, a cooling water system, a charging and discharging system, and an electric control system.

First, the vacuum sintering furnace body:

a)      Double-layer water-cooled structure, made of 304 stainless steel, internally polished according to high vacuum requirements, externally polished and sandblasted;

b)     Vertical structure, the furnace body is cylindrical, the lower part is the head, and the upper part is the vacuum flange. The furnace door is located above the furnace body, and is flanged to the furnace body, the sealing structure is in the form of a flange, the high temperature resistant fluoro rubber lip ring is sealed, and the hand wheel bolt is locked;

c)      The vacuum port is located at the upper part of the furnace body, and is connected with the vacuum flange of the vacuum unit, and the high temperature resistant fluorine rubber O-ring is sealed;

d)     The electrode introduction device is located at the lower portion of the furnace body in a total of three groups. The material is copper. In-furnace and outside the furnace are insulated with corundum tubes and sealed. Flange connection with the furnace body, O-ring;

e)      The furnace body is provided with a charging and discharging device, the inflating port is located below the furnace body, and the air discharging port is located above the furnace body;

f)       The furnace body is provided with a temperature control port, and the tungsten germanium thermocouple measures the temperature; and an electrode introduction device is provided for the temperature uniformity measurement at 1100 ° C.

Second, the vacuum sintering furnace heating chamber :

a)      Used for vacuum or protective atmosphere.

b)     The heating element is a high-strength graphite heater (using the East China Sea carbon graphite, the graphite has stable resistivity, low ash content and uniform thermal conductivity) , and it is circularly symmetrically distributed outside the uniform temperature zone, and the three-zone heating method ensures the most Excellent temperature uniformity and uniform heating of the workpiece.

c)      Insulation material is imported from the United States. Hard insulation material is an important part of vacuum furnace. The insulation materials of our equipment are made of hard carbon felt imported from the United States. The products have excellent thermal insulation properties, low ash and high carbonization temperature. , low bulk density, small coefficient of thermal expansion, etc., is a high-performance thermal insulation material necessary for high-temperature vacuum furnaces) and mullite insulation felt reflective screen;

d)     The heating element is easy to replace. The entire heating zone can be removed as a structurally complete part for easy maintenance and repair. The loading station is mounted on the base of the furnace and is composed of a material that is resistant to high temperatures.

Third, the vacuum sintering furnace vacuum system :

a)      Adopt KT-250 diffusion pump/ZJP-150 Roots pump/2X-30 rotary vane pump three-stage high vacuum unit, add filter before the unit to extend the service life of vacuum pump;

b)     Vacuum valve, electromagnetic bleed valve, pipeline, bellows, etc.; the leak detection port and vacuum gauge interface are left on the pipeline;

Fourth, the cooling water system :

According to the requirements of the cooling water in each part of the vacuum furnace, the water collecting row is made up of valves, pipelines, etc.; the furnace body, the furnace door, the sealing ring, the vacuum pump and the water-cooled electrode are cooled. The water inlet sensor is installed in the total inlet pipe to ensure the safety of the equipment.

Fifth. Charging and discharging system :

It consists of a solenoid valve, a trim valve and a pipeline. Different inflation pressure ranges can be set, and the pressure switch can automatically inflate and liquefy.

Sixth, electronic control system :

a)      Using OMRON programmable controller PLC , portable notebook computer, self-developed configuration software , automatic control, data acquisition, digital display and storage recordaccording to the process requirements . Changes in parameters such as temperature, vacuum, and pressure can be recorded and displayed . The stored data can be queried, copied, and connected to the printer (user-supplied) to print out the historical history record.

b)     Japan Island Electric Company FP93 digital display temperature control meter, used to intelligently control and display the heating process, so that the heating process is carried out step by step according to the process requirements; the temperature measurement uses tungsten-rhodium thermocouple;

c)      Heating power supply: three-phase, thyristor thyristor power supply;

d)     Composite digital vacuum gauge, thermocouple under low vacuum, ionization gauge under high vacuum;

e)      All instruments and control components are concentrated in a special electrical control cabinet;

f)       Set the necessary alarms and protections, such as over temperature, low water pressure, low air pressure, etc.

Seventh, work platform :

An operating platform is made of steel and connecting parts, and stainless steel plates are laid on the upper part. The vacuum unit and the transformer are placed in the lower part, the water-cooled interface, the electrode is introduced into the copper row, and the vacuum furnace body and the control panel are placed on the upper part.

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